School of Engineering

Researchers at Massachusetts Institute of Technology (MIT) and Chinese University of Hong Kong have invented a machine learning-based digital simulator to shrink the gap between design intention and actual manufacturing of computer chips and optical devices. The process of photolithography used in creating such devices often leads to tiny deviations between theoretical design and practical…

Photolithography, a technique for fabricating computer chips and optical devices, frequently encounters problems due to minute deviations during the manufacturing process. To address this, scientists from MIT and the Chinese University of Hong Kong have successfully used machine learning to build a digital simulator that effectively mimics certain photolithography manufacturing processes. The simulator, which utilizes…